Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790174 | Wafer transport assembly with integrated buffers | David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2020-09-29 |
| 10615009 | System implementing machine learning in complex multivariate wafer processing equipment | Joydeep Guha, Vahid Vahedi, Richard A. Gottscho | 2020-04-07 |
| 10557197 | Monolithic gas distribution manifold and various construction techniques and use cases therefor | Andrew C. Lee, Michael C. Kellogg, Christopher Pena | 2020-02-11 |