Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804079 | Active showerhead | Mariusch Gregor, Thorsten Lill | 2020-10-13 |
| 10790174 | Wafer transport assembly with integrated buffers | John Daugherty, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2020-09-29 |