Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790174 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Michael C. Kellogg, Christopher Pena, Klay Kunkel | 2020-09-29 |
| 10593583 | Integrated systems for interfacing with substrate container storage systems | Anthony C. Bonora, Michael Krolak | 2020-03-17 |
| 10566216 | Equipment front end module gas recirculation | Brandon Senn, Peter R. Wassei, Scott Wong, Silvia Rocio Aguilar Amaya, Todd A. Lopes +2 more | 2020-02-18 |
| 10559483 | Platform architecture to improve system productivity | Candi Kristoffersen, Gustavo G. Francken, James Van Gogh, Benjamin W. Mooring | 2020-02-11 |