Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10566216 | Equipment front end module gas recirculation | Brandon Senn, Peter R. Wassei, Scott Wong, Silvia Rocio Aguilar Amaya, Richard H. Gould +2 more | 2020-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10566216 | Equipment front end module gas recirculation | Brandon Senn, Peter R. Wassei, Scott Wong, Silvia Rocio Aguilar Amaya, Richard H. Gould +2 more | 2020-02-18 |