Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10707113 | End effector assembly for clean/dirty substrate handling | Ross Embertson, Austin Ngo, Matthew J. Rodnick | 2020-07-07 |
| 10566216 | Equipment front end module gas recirculation | Peter R. Wassei, Scott Wong, Silvia Rocio Aguilar Amaya, Todd A. Lopes, Richard H. Gould +2 more | 2020-02-18 |