Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872748 | Systems and methods for correcting non-uniformities in plasma processing of substrates | Keith Gaff, Brett C. Richardson, Sung Lee | 2020-12-22 |
| 10720346 | Substrate support with thermal zones for semiconductor processing | Keith Gaff, Neil Benjamin, Keith Comendant | 2020-07-21 |
| 10636625 | System for coordinating pressure pulses and RF modulation in a small volume confined process reactor | Rajinder Dhindsa | 2020-04-28 |
| 10586256 | Systems and methods for context based engagement in advertisement | Carsten Miller | 2020-03-10 |
| 10585347 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Saravanapriyan Sriraman, Richard Wise, Alex Paterson, Andrew D. Bailey, III, Vahid Vahedi +1 more | 2020-03-10 |
| 10568163 | Methods of fault detection for multiplexed heater array | — | 2020-02-18 |
| 10554384 | Aggregation of encrypted data | Ranjita Bhagwan, Nishanth Chandran, Ramachandran Ramjee, Antonios Papadimitriou, Saikrishna Badrinarayanan | 2020-02-04 |