Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872748 | Systems and methods for correcting non-uniformities in plasma processing of substrates | Harmeet Singh, Brett C. Richardson, Sung Lee | 2020-12-22 |
| 10804081 | Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber | Ambarish Chhatre, David Schaefer | 2020-10-13 |
| 10804129 | Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode | Christopher Kimball, Alexander Matyushkin, Zhigang Chen, Keith Comendant | 2020-10-13 |
| 10770363 | Power switching system for ESC with array of thermal control elements | Tom Anderson, Keith Comendant, Ralph Jan-Pin Lu, Paul Gordon Robertson, Eric A. Pape +1 more | 2020-09-08 |
| 10720346 | Substrate support with thermal zones for semiconductor processing | Harmeet Singh, Neil Benjamin, Keith Comendant | 2020-07-21 |
| 10690414 | Multi-plane heater for semiconductor substrate support | Benny Wu, Eric A. Pape | 2020-06-23 |