Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770363 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Keith Comendant, Ralph Jan-Pin Lu, Paul Gordon Robertson +1 more | 2020-09-08 |
| 10764966 | Laminated heater with different heater trace materials | Yuma Ohkura, Darrell Ehrlich | 2020-09-01 |
| 10707110 | Matched TCR joule heater designs for electrostatic chucks | — | 2020-07-07 |
| 10690414 | Multi-plane heater for semiconductor substrate support | Keith Gaff, Benny Wu | 2020-06-23 |
| 10667379 | Connections between laminated heater and heater voltage inputs | Yuma Ohkura, Darrell Ehrlich | 2020-05-26 |