Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10764966 | Laminated heater with different heater trace materials | Yuma Ohkura, Eric A. Pape | 2020-09-01 |
| 10667379 | Connections between laminated heater and heater voltage inputs | Yuma Ohkura, Eric A. Pape | 2020-05-26 |
| 10622195 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more | 2020-04-14 |