Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10795262 | Method of manufacturing integrated circuit device | Jin Hong Park, Kyu-Hee Han, Jin Kim, Gwang-we Yoo | 2020-10-06 |
| 10622195 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Jim Rogers +6 more | 2020-04-14 |
| 10586686 | Peripheral RF feed and symmetric RF return for symmetric RF delivery | Rajinder Dhindsa, James Rogers | 2020-03-10 |