Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804129 | Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode | Christopher Kimball, Keith Gaff, Alexander Matyushkin, Zhigang Chen | 2020-10-13 |
| 10770363 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Ralph Jan-Pin Lu, Paul Gordon Robertson, Eric A. Pape +1 more | 2020-09-08 |
| 10720346 | Substrate support with thermal zones for semiconductor processing | Harmeet Singh, Keith Gaff, Neil Benjamin | 2020-07-21 |
| 10636689 | Apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, James E. Tappan | 2020-04-28 |