Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872748 | Systems and methods for correcting non-uniformities in plasma processing of substrates | Harmeet Singh, Keith Gaff, Sung Lee | 2020-12-22 |
| 10854492 | Edge ring assembly for improving feature profile tilting at extreme edge of wafer | William Frederick Bosch, Rajesh Dorai, Tamarak Pandhumsoporn, James C. Vetter, Patrick Chung | 2020-12-01 |