Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854492 | Edge ring assembly for improving feature profile tilting at extreme edge of wafer | William Frederick Bosch, Tamarak Pandhumsoporn, Brett C. Richardson, James C. Vetter, Patrick Chung | 2020-12-01 |