Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796912 | Eliminating yield impact of stochastics in lithography | Nader Shamma, Jengyi Yu, Samantha Tan | 2020-10-06 |
| 10685836 | Etching substrates using ALE and selective deposition | Samantha Tan, Jengyi Yu, Nader Shamma, Yang Pan | 2020-06-16 |
| 10585347 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Saravanapriyan Sriraman, Harmeet Singh, Alex Paterson, Andrew D. Bailey, III, Vahid Vahedi +1 more | 2020-03-10 |
| 10546748 | Tin oxide films in semiconductor device manufacturing | Jengyi Yu, Samantha Tan, Yu Jiang, Hui-Jung Wu, Yang Pan +2 more | 2020-01-28 |
| 10534257 | Layout pattern proximity correction through edge placement error prediction | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey, III | 2020-01-14 |