Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796912 | Eliminating yield impact of stochastics in lithography | Nader Shamma, Richard Wise, Samantha Tan | 2020-10-06 |
| 10685836 | Etching substrates using ALE and selective deposition | Samantha Tan, Richard Wise, Nader Shamma, Yang Pan | 2020-06-16 |
| 10546748 | Tin oxide films in semiconductor device manufacturing | Samantha Tan, Yu Jiang, Hui-Jung Wu, Richard Wise, Yang Pan +2 more | 2020-01-28 |