Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861708 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Eric A. Hudson, Felix Kozakevich +2 more | 2020-12-08 |
| 10825656 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2020-11-03 |
| 10825661 | Systems for cooling RF heated chamber components | Jon McChesney, Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson | 2020-11-03 |
| 10755895 | Ion energy control by RF pulse shape | Alexei Marakhtanov, Zhigang Chen | 2020-08-25 |
| 10665435 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2020-05-26 |
| 10615003 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2020-04-07 |