Issued Patents 2020
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861708 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Felix Kozakevich, John Holland +2 more | 2020-12-08 |
| 10847375 | Selective atomic layer etching | Chia-Chun Wang, Andrew Clark Serino, Nerissa Draeger, Zhonghao Zhang | 2020-11-24 |
| 10847374 | Method for etching features in a stack | Leonid Belau, Francis Sloan Roberts | 2020-11-24 |
| 10815819 | Variable area turbine arrangement with secondary flow modulation | Raymond Surace | 2020-10-27 |
| 10808551 | Airfoil cooling circuits | Tracy A. Propheter-Hinckley, San Quach, Matthew A. Devore | 2020-10-20 |
| 10781716 | Blade outer air seal cooling scheme | Susan M. Tholen, Dominic J. Mongillo, Paul M. Lutjen, James N. Knapp, Virginia L. Ross +1 more | 2020-09-22 |
| 10741367 | Methods for processing substrates using a movable plasma confinement structure | — | 2020-08-11 |
| 10662779 | Gas turbine engine component with degradation cooling scheme | Tracy A. Propheter-Hinckley | 2020-05-26 |
| 10622195 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more | 2020-04-14 |
| 10553399 | Pulsed plasma chamber in dual chamber configuration | Alexei Marakhtanov, Rajinder Dhindsa, Andrew D. Bailey, III | 2020-02-04 |
| 10541144 | Self-assembled monolayers as an etchant in atomic layer etching | — | 2020-01-21 |