| 10861708 |
Three or more states for achieving high aspect ratio dielectric etch |
Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Felix Kozakevich, John Holland +2 more |
2020-12-08 |
| 10847375 |
Selective atomic layer etching |
Chia-Chun Wang, Andrew Clark Serino, Nerissa Draeger, Zhonghao Zhang |
2020-11-24 |
| 10847374 |
Method for etching features in a stack |
Leonid Belau, Francis Sloan Roberts |
2020-11-24 |
| 10815819 |
Variable area turbine arrangement with secondary flow modulation |
Raymond Surace |
2020-10-27 |
| 10808551 |
Airfoil cooling circuits |
Tracy A. Propheter-Hinckley, San Quach, Matthew A. Devore |
2020-10-20 |
| 10781716 |
Blade outer air seal cooling scheme |
Susan M. Tholen, Dominic J. Mongillo, Paul M. Lutjen, James N. Knapp, Virginia L. Ross +1 more |
2020-09-22 |
| 10741367 |
Methods for processing substrates using a movable plasma confinement structure |
— |
2020-08-11 |
| 10662779 |
Gas turbine engine component with degradation cooling scheme |
Tracy A. Propheter-Hinckley |
2020-05-26 |
| 10622195 |
Multi zone gas injection upper electrode system |
Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more |
2020-04-14 |
| 10553399 |
Pulsed plasma chamber in dual chamber configuration |
Alexei Marakhtanov, Rajinder Dhindsa, Andrew D. Bailey, III |
2020-02-04 |
| 10541144 |
Self-assembled monolayers as an etchant in atomic layer etching |
— |
2020-01-21 |
