Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847375 | Selective atomic layer etching | Eric A. Hudson, Andrew Clark Serino, Nerissa Draeger, Zhonghao Zhang | 2020-11-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847375 | Selective atomic layer etching | Eric A. Hudson, Andrew Clark Serino, Nerissa Draeger, Zhonghao Zhang | 2020-11-24 |