Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10621264 | Correction of angular error of plane-of-incidence azimuth of optical metrology device | Pedro Vagos, Ye Feng, Daniel Thompson | 2020-04-14 |
| 10572697 | Method of etch model calibration using optical scatterometry | Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Mehmet Derya Tetiker, Saravanapriyan Sriraman +1 more | 2020-02-25 |