Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10621264 | Correction of angular error of plane-of-incidence azimuth of optical metrology device | Ye Feng, Daniel Thompson, Yan Zhang | 2020-04-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10621264 | Correction of angular error of plane-of-incidence azimuth of optical metrology device | Ye Feng, Daniel Thompson, Yan Zhang | 2020-04-14 |