Issued Patents 2020
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10843618 | Conformality modulation of metal oxide films using chemical inhibition | David Charles Smith | 2020-11-24 |
| 10831096 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Adrien LaVoie, Thomas Knisley +3 more | 2020-11-10 |
| 10825679 | Selective growth of SIO2 on dielectric surfaces in the presence of copper | Alexander R. Fox, Colleen Lawlor | 2020-11-03 |
| 10804144 | Deposition of aluminum oxide etch stop layers | Meliha Gozde Rainville, Nagraj Shankar, Kapu Sirish Reddy | 2020-10-13 |
| 10804099 | Selective inhibition in atomic layer deposition of silicon-containing films | Jon Henri, Bart J. van Schravendijk, Shane Tang, Karl Leeser | 2020-10-13 |
| 10777407 | Selective deposition of silicon nitride on silicon oxide using catalytic control | David Charles Smith | 2020-09-15 |
| 10763108 | Geometrically selective deposition of a dielectric film | Alexander R. Fox, David Charles Smith, Bart J. van Schravendijk | 2020-09-01 |
| 10665501 | Deposition of Aluminum oxide etch stop layers | Meliha Gozde Rainville, Nagraj Shankar, Kapu Sirish Reddy | 2020-05-26 |
| 10662526 | Method for selective deposition using a base-catalyzed inhibitor | Alexander R. Fox, Paul C. Lemaire, David Charles Smith | 2020-05-26 |
| 10643889 | Pre-treatment method to improve selectivity in a selective deposition process | Elham Mohimi, Pengyi Zhang, Paul C. Lemaire, Kashish Sharma, Alexander R. Fox +3 more | 2020-05-05 |
| 10643846 | Selective growth of metal-containing hardmask thin films | David Charles Smith, Jon Henri, Paul C. Lemaire | 2020-05-05 |
| 10629429 | Selective deposition of silicon oxide | David Charles Smith | 2020-04-21 |
| 10559461 | Selective deposition with atomic layer etch reset | Kapu Sirish Reddy, Meliha Gozde Rainville, Nagraj Shankar, David Charles Smith, Karthik Sivaramakrishnan +1 more | 2020-02-11 |