Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804144 | Deposition of aluminum oxide etch stop layers | Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann | 2020-10-13 |
| 10745806 | Showerhead with air-gapped plenums and overhead isolation gas distributor | Nagraj Shankar, Jeffrey Womack, Meliha Gozde Rainville, Emile C. Draper, Pankaj G. Ramnani +3 more | 2020-08-18 |
| 10665501 | Deposition of Aluminum oxide etch stop layers | Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann | 2020-05-26 |
| 10651080 | Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing | Meliha Gozde Rainville, Nagraj Shankar, Daniel Damjanovic | 2020-05-12 |
| 10643889 | Pre-treatment method to improve selectivity in a selective deposition process | Dennis M. Hausmann, Elham Mohimi, Pengyi Zhang, Paul C. Lemaire, Kashish Sharma +3 more | 2020-05-05 |
| 10566194 | Selective deposition of etch-stop layer for enhanced patterning | Nagraj Shankar, Jon Henri, Pengyi Zhang, Elham Mohimi, Bhavin Jariwala +1 more | 2020-02-18 |
| 10559461 | Selective deposition with atomic layer etch reset | Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann, David Charles Smith, Karthik Sivaramakrishnan +1 more | 2020-02-11 |