EM

Elham Mohimi

Lam Research: 3 patents #61 of 457Top 15%
Overall (2020): #91,922 of 565,922Top 20%
3
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10745806 Showerhead with air-gapped plenums and overhead isolation gas distributor Nagraj Shankar, Jeffrey Womack, Meliha Gozde Rainville, Emile C. Draper, Pankaj G. Ramnani +3 more 2020-08-18
10643889 Pre-treatment method to improve selectivity in a selective deposition process Dennis M. Hausmann, Pengyi Zhang, Paul C. Lemaire, Kashish Sharma, Alexander R. Fox +3 more 2020-05-05
10566194 Selective deposition of etch-stop layer for enhanced patterning Nagraj Shankar, Kapu Sirish Reddy, Jon Henri, Pengyi Zhang, Bhavin Jariwala +1 more 2020-02-18