Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804144 | Deposition of aluminum oxide etch stop layers | Nagraj Shankar, Kapu Sirish Reddy, Dennis M. Hausmann | 2020-10-13 |
| 10745806 | Showerhead with air-gapped plenums and overhead isolation gas distributor | Nagraj Shankar, Jeffrey Womack, Emile C. Draper, Pankaj G. Ramnani, Feng Bi +3 more | 2020-08-18 |
| 10665501 | Deposition of Aluminum oxide etch stop layers | Nagraj Shankar, Kapu Sirish Reddy, Dennis M. Hausmann | 2020-05-26 |
| 10651080 | Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing | Nagraj Shankar, Daniel Damjanovic, Kapu Sirish Reddy | 2020-05-12 |
| 10559461 | Selective deposition with atomic layer etch reset | Kapu Sirish Reddy, Nagraj Shankar, Dennis M. Hausmann, David Charles Smith, Karthik Sivaramakrishnan +1 more | 2020-02-11 |