| 10843618 |
Conformality modulation of metal oxide films using chemical inhibition |
Dennis M. Hausmann |
2020-11-24 |
| 10777407 |
Selective deposition of silicon nitride on silicon oxide using catalytic control |
Dennis M. Hausmann |
2020-09-15 |
| 10763108 |
Geometrically selective deposition of a dielectric film |
Dennis M. Hausmann, Alexander R. Fox, Bart J. van Schravendijk |
2020-09-01 |
| 10692724 |
Atomic layer etching methods and apparatus |
Thorsten Lill, Andreas Fischer |
2020-06-23 |
| 10662526 |
Method for selective deposition using a base-catalyzed inhibitor |
Dennis M. Hausmann, Alexander R. Fox, Paul C. Lemaire |
2020-05-26 |
| 10665429 |
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity |
Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more |
2020-05-26 |
| 10643889 |
Pre-treatment method to improve selectivity in a selective deposition process |
Dennis M. Hausmann, Elham Mohimi, Pengyi Zhang, Paul C. Lemaire, Kashish Sharma +3 more |
2020-05-05 |
| 10643846 |
Selective growth of metal-containing hardmask thin films |
Jon Henri, Dennis M. Hausmann, Paul C. Lemaire |
2020-05-05 |
| 10629429 |
Selective deposition of silicon oxide |
Dennis M. Hausmann |
2020-04-21 |
| 10559461 |
Selective deposition with atomic layer etch reset |
Kapu Sirish Reddy, Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann, Karthik Sivaramakrishnan +1 more |
2020-02-11 |
| 10526700 |
Hardware and process for film uniformity improvement |
Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more |
2020-01-07 |
