| 10757248 |
Identifying location of mobile phones in a vehicle |
Xinlin Wang, Cheng Luo, Lan Cao, Cheng Cheng Dong |
2020-08-25 |
| 10679848 |
Selective atomic layer deposition with post-dose treatment |
Purushottam Kumar, Adrien LaVoie, Ishtak Karim, Frank L. Pasquale, Bart J. van Schravendijk |
2020-06-09 |
| 10665429 |
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity |
Hu Kang, Adrien LaVoie, Shankar Swaminathan, Chloe Baldasseroni, Frank L. Pasquale +8 more |
2020-05-26 |
| 10651098 |
Polishing with measurement prior to deposition of outer layer |
Tomohiko Kitajima, Jeffrey Drue David, Taketo Sekine, Garlen C. Leung, Sidney P. Huey |
2020-05-12 |
| 10577691 |
Single ALD cycle thickness control in multi-station substrate deposition systems |
Romuald Nowak, Hu Kang, Adrien LaVoie |
2020-03-03 |
| 10566187 |
Ultrathin atomic layer deposition film accuracy thickness control |
Hu Kang, Adrien LaVoie, Seiji Matsuyama, Purushottam Kumar |
2020-02-18 |
| 10559468 |
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors |
Reza Arghavani, Samantha Tan, Bhadri N. Varadarajan, Adrien LaVoie, Ananda Banerji +1 more |
2020-02-11 |
| 10526700 |
Hardware and process for film uniformity improvement |
Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more |
2020-01-07 |
| 10526701 |
Multi-cycle ALD process for film uniformity and thickness profile modulation |
Purushottam Kumar, Adrien LaVoie, Hu Kang, Tuan Nguyen, Ye Wang |
2020-01-07 |
