Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10577691 | Single ALD cycle thickness control in multi-station substrate deposition systems | Hu Kang, Adrien LaVoie, Jun Qian | 2020-03-03 | $44,545,000 |
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Skip to contentShowing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10577691 | Single ALD cycle thickness control in multi-station substrate deposition systems | Hu Kang, Adrien LaVoie, Jun Qian | 2020-03-03 | $44,545,000 |