Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10577691 | Single ALD cycle thickness control in multi-station substrate deposition systems | Hu Kang, Adrien LaVoie, Jun Qian | 2020-03-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10577691 | Single ALD cycle thickness control in multi-station substrate deposition systems | Hu Kang, Adrien LaVoie, Jun Qian | 2020-03-03 |