Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10741458 | Methods for depositing films on sensitive substrates | Shankar Swaminathan, Adrien LaVoie, Jon Henri | 2020-08-11 |
| 10741365 | Low volume showerhead with porous baffle | Ramesh Chandrasekharan, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Adrien LaVoie | 2020-08-11 |
| 10665429 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni, Frank L. Pasquale +8 more | 2020-05-26 |
| 10577691 | Single ALD cycle thickness control in multi-station substrate deposition systems | Romuald Nowak, Adrien LaVoie, Jun Qian | 2020-03-03 |
| 10577688 | Tandem source activation for CVD of films | Adrien LaVoie, Karl Leeser | 2020-03-03 |
| 10566187 | Ultrathin atomic layer deposition film accuracy thickness control | Jun Qian, Adrien LaVoie, Seiji Matsuyama, Purushottam Kumar | 2020-02-18 |
| 10526700 | Hardware and process for film uniformity improvement | Purushottam Kumar, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale, Jun Qian +5 more | 2020-01-07 |
| 10526701 | Multi-cycle ALD process for film uniformity and thickness profile modulation | Purushottam Kumar, Adrien LaVoie, Jun Qian, Tuan Nguyen, Ye Wang | 2020-01-07 |