Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10808317 | Deposition apparatus including an isothermal processing zone | Jeremy Tucker, Karl Leeser, Alan M. Schoepp | 2020-10-20 |
| 10781516 | Chemical deposition chamber having gas seal | Jeremy Tucker, Saangrut Sangplung | 2020-09-22 |
| 10741365 | Low volume showerhead with porous baffle | Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Hu Kang, Adrien LaVoie | 2020-08-11 |
| 10633742 | Use of voltage and current measurements to control dual zone ceramic pedestals | Aaron Durbin, Dirk Rudolph, Thomas G. Jewell | 2020-04-28 |
| 10622243 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Karl Leeser, Paul Konkola, Adrien LaVoie, Chloe Baldasseroni +7 more | 2020-04-14 |