Issued Patents 2020
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840061 | Substrate processing chamber including conical surface for reducing recirculation | Richard Phillips, Ryan Blaquiere | 2020-11-17 |
| 10741458 | Methods for depositing films on sensitive substrates | Hu Kang, Adrien LaVoie, Jon Henri | 2020-08-11 |
| 10741365 | Low volume showerhead with porous baffle | Ramesh Chandrasekharan, Saangrut Sangplung, Frank L. Pasquale, Hu Kang, Adrien LaVoie | 2020-08-11 |
| 10665429 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Jun Qian, Chloe Baldasseroni, Frank L. Pasquale +8 more | 2020-05-26 |
| 10648079 | Reducing backside deposition at wafer edge | Chloe Baldasseroni, Andrew Duvall, Ryan Blaquiere | 2020-05-12 |
| 10629435 | Doped ALD films for semiconductor patterning applications | Richard Phillips, Adrien LaVoie | 2020-04-21 |
| 10622243 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie +7 more | 2020-04-14 |
| 10559468 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Bhadri N. Varadarajan, Adrien LaVoie, Ananda Banerji +1 more | 2020-02-11 |
| 10541117 | Systems and methods for tilting a wafer for achieving deposition uniformity | Pramod Subramonium, Frank L. Pasquale, Jeongseok Ha, Chloe Baldasseroni | 2020-01-21 |
| 10526700 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more | 2020-01-07 |
| 10529557 | Systems and methods for UV-based suppression of plasma instability | — | 2020-01-07 |