Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840082 | Method to clean SnO2 film from chamber | Akhil Singhal, Dustin Zachary Austin, Pei-Chi Liu | 2020-11-17 |
| 10541117 | Systems and methods for tilting a wafer for achieving deposition uniformity | Shankar Swaminathan, Pramod Subramonium, Frank L. Pasquale, Chloe Baldasseroni | 2020-01-21 |