Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10741365 | Low volume showerhead with porous baffle | Ramesh Chandrasekharan, Saangrut Sangplung, Shankar Swaminathan, Hu Kang, Adrien LaVoie | 2020-08-11 |
| 10679848 | Selective atomic layer deposition with post-dose treatment | Purushottam Kumar, Adrien LaVoie, Ishtak Karim, Jun Qian, Bart J. van Schravendijk | 2020-06-09 |
| 10665429 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more | 2020-05-26 |
| 10622243 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie +7 more | 2020-04-14 |
| 10541117 | Systems and methods for tilting a wafer for achieving deposition uniformity | Shankar Swaminathan, Pramod Subramonium, Jeongseok Ha, Chloe Baldasseroni | 2020-01-21 |
| 10526700 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Jun Qian +5 more | 2020-01-07 |