Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692717 | Minimization of carbon loss in ALD SiO2 deposition on hardmask films | Douglas Walter Agnew | 2020-06-23 |
| 10679848 | Selective atomic layer deposition with post-dose treatment | Purushottam Kumar, Adrien LaVoie, Jun Qian, Frank L. Pasquale, Bart J. van Schravendijk | 2020-06-09 |
| 10655224 | Conical wafer centering and holding device for semiconductor processing | Pulkit Agarwal, Purushottam Kumar, Adrien LaVoie, Sung Je Kim, Patrick Breiling | 2020-05-19 |
| 10622243 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie +7 more | 2020-04-14 |