Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692717 | Minimization of carbon loss in ALD SiO2 deposition on hardmask films | Ishtak Karim | 2020-06-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692717 | Minimization of carbon loss in ALD SiO2 deposition on hardmask films | Ishtak Karim | 2020-06-23 |