Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847352 | Compensating chamber and process effects to improve critical dimension variation for trim process | Adrien LaVoie, Ravi Kumar, Purushottam Kumar | 2020-11-24 |
| 10801109 | Method and apparatus for providing station to station uniformity | Adrien LaVoie | 2020-10-13 |
| 10727143 | Method for controlling core critical dimension variation using flash trim sequence | Adrien LaVoie, Ravi Kumar, Purushottam Kumar | 2020-07-28 |
| 10655224 | Conical wafer centering and holding device for semiconductor processing | Ishtak Karim, Purushottam Kumar, Adrien LaVoie, Sung Je Kim, Patrick Breiling | 2020-05-19 |
| 10658172 | Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer | Joseph R. Abel, Richard Phillips, Purushottam Kumar, Adrien LaVoie | 2020-05-19 |
| 10579371 | Recommendations for custom software upgrade by cognitive technologies | Santanu Chakrabarty, Sivaranjani Kathirvel, Sivaraj Sethunamasivayam | 2020-03-03 |