Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727046 | Surface modified depth controlled deposition for plasma based deposition | Adrien LaVoie, Purushottam Kumar | 2020-07-28 |
| 10658172 | Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer | Pulkit Agarwal, Richard Phillips, Purushottam Kumar, Adrien LaVoie | 2020-05-19 |
| 10636686 | Method monitoring chamber drift | Purushottam Kumar, Adrien LaVoie | 2020-04-28 |