Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10655224 | Conical wafer centering and holding device for semiconductor processing | Pulkit Agarwal, Ishtak Karim, Purushottam Kumar, Adrien LaVoie, Sung Je Kim | 2020-05-19 |
| 10622243 | Planar substrate edge contact with open volume equalization pathways and side containment | Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie, Chloe Baldasseroni +7 more | 2020-04-14 |
| 10604841 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Bo Gong, Will Schlosser +3 more | 2020-03-31 |