Patrick Breiling — 3 Patents at Lam Research

Issued Patents 2020

Showing 1–3 of 3 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
10655224	Conical wafer centering and holding device for semiconductor processing	Pulkit Agarwal, Ishtak Karim, Purushottam Kumar, Adrien LaVoie, Sung Je Kim	2020-05-19	$40,560,000
10622243	Planar substrate edge contact with open volume equalization pathways and side containment	Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie, Chloe Baldasseroni +7 more	2020-04-14
10604841	Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition	Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Bo Gong, Will Schlosser +3 more	2020-03-31	$259,981,000