Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840087 | Remote plasma based deposition of boron nitride, boron carbide, and boron carbonitride films | Matthew Scott Weimer | 2020-11-17 |
| 10831096 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie +3 more | 2020-11-10 |
| 10832904 | Remote plasma based deposition of oxygen doped silicon carbide films | — | 2020-11-10 |
| 10763107 | Methods of encapsulation | Bart J. van Schravendijk, Akhil Singhal, Joseph Hung-chi Wei, Kevin McLaughlin, Casey Holder +1 more | 2020-09-01 |
| 10604841 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Patrick Breiling, Bo Gong, Will Schlosser +3 more | 2020-03-31 |
| 10580690 | Staircase encapsulation in 3D NAND fabrication | Yongsik Yu, Bart J. van Schravendijk, Nagraj Shankar | 2020-03-03 |
| 10566186 | Methods of encapsulation | Bart J. van Schravendijk, Akhil Singhal, Joseph Hung-chi Wei, Kevin McLaughlin, Casey Holder +1 more | 2020-02-18 |
| 10559468 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Adrien LaVoie, Ananda Banerji, Jun Qian +1 more | 2020-02-11 |