Issued Patents 2020
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879048 | Flow through line charge volume | — | 2020-12-29 |
| 10870922 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2020-12-22 |
| 10832936 | Substrate support with increasing areal density and corresponding method of fabricating | Peter J. Woytowitz, Vincent E. Burkhart, Michael Rumer | 2020-11-10 |
| 10808317 | Deposition apparatus including an isothermal processing zone | Ramesh Chandrasekharan, Jeremy Tucker, Alan M. Schoepp | 2020-10-20 |
| 10804099 | Selective inhibition in atomic layer deposition of silicon-containing films | Jon Henri, Dennis M. Hausmann, Bart J. van Schravendijk, Shane Tang | 2020-10-13 |
| 10699937 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2020-06-30 |
| 10666218 | Multiple-output radiofrequency matching module and associated methods | Sunil Kapoor, Bradford J. Lyndaker | 2020-05-26 |
| 10665429 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more | 2020-05-26 |
| 10637427 | Mutually induced filters | Sunil Kapoor, Aaron W. Logan, Hyungjoon Kim, Yaswanth Rangineni | 2020-04-28 |
| 10636624 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Sunil Kapoor, Vince Burkhart | 2020-04-28 |
| 10622243 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Paul Konkola, Adrien LaVoie, Chloe Baldasseroni +7 more | 2020-04-14 |
| 10591182 | Apparatus for thermal control of tubing assembly and associated methods | — | 2020-03-17 |
| 10577688 | Tandem source activation for CVD of films | Adrien LaVoie, Hu Kang | 2020-03-03 |
| 10573549 | Pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2020-02-25 |
| 10570515 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2020-02-25 |
| 10550469 | Plasma excitation for spatial atomic layer deposition (ALD) reactors | — | 2020-02-04 |
| 10526700 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more | 2020-01-07 |