Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861708 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Eric A. Hudson, Felix Kozakevich +2 more | 2020-12-08 |
| 10707056 | Using modeling to determine ion energy associated with a plasma system | John C. Valcore, Jr. | 2020-07-07 |
| 10666218 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Sunil Kapoor | 2020-05-26 |
| 10629413 | Adjustment of power and frequency based on three or more states | John C. Valcore, Jr. | 2020-04-21 |