Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879092 | Fault detection using showerhead voltage variation | Sunil Kapoor, Aaron Bingham, Tuan Nguyen | 2020-12-29 |
| 10637427 | Mutually induced filters | Sunil Kapoor, Aaron W. Logan, Hyungjoon Kim, Karl Leeser | 2020-04-28 |
| 10622962 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | Sunil Kapoor, George Thomas, Edward Augustyniak | 2020-04-14 |