Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622962 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | Sunil Kapoor, Yaswanth Rangineni, Edward Augustyniak | 2020-04-14 |
| 10553465 | Control of water bow in multiple stations | Edward Augustyniak, David French, Sunil Kapoor, Yukinori Sakiyama | 2020-02-04 |