Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876209 | Systems and methods for determining film thickness using DC self-bias voltage | Douglas Keil | 2020-12-29 |
| 10665429 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more | 2020-05-26 |
| 10619245 | Hollow cathode discharge (HCD) suppressing capacitively coupled plasma electrode and gas distribution faceplate | Jeremy Tucker | 2020-04-14 |
| 10622962 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | Sunil Kapoor, George Thomas, Yaswanth Rangineni | 2020-04-14 |
| 10553465 | Control of water bow in multiple stations | David French, Sunil Kapoor, Yukinori Sakiyama, George Thomas | 2020-02-04 |