Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870922 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2020-12-22 |
| 10872747 | Controlling showerhead heating via resistive thermal measurements | Nick Ray Linebarger, Jr., Curtis Bailey, Devon Pelkey | 2020-12-22 |
| 10699937 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2020-06-30 |
| 10584415 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson | 2020-03-10 |
| 10570515 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2020-02-25 |
| 10573549 | Pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2020-02-25 |