Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872747 | Controlling showerhead heating via resistive thermal measurements | Nick Ray Linebarger, Jr., Easwar Srinivasan, Devon Pelkey | 2020-12-22 |
| 10851457 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Nick Ray Linebarger, Jr. | 2020-12-01 |
| 10760158 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Tony Kaushal, Krishna Birru +11 more | 2020-09-01 |