Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10760158 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Curtis Bailey, Tony Kaushal, Krishna Birru +11 more | 2020-09-01 |