Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872747 | Controlling showerhead heating via resistive thermal measurements | Curtis Bailey, Easwar Srinivasan, Devon Pelkey | 2020-12-22 |
| 10851457 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Curtis Bailey | 2020-12-01 |
| 10655225 | Substrate pedestal module including backside gas delivery tube and method of making | Troy Alan Gomm | 2020-05-19 |