Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870922 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Karl Leeser, Easwar Srinivasan | 2020-12-22 |
| 10699937 | Wafer positioning pedestal for semiconductor processing | Karl Leeser, Easwar Srinivasan | 2020-06-30 |
| 10651065 | Auto-calibration to a station of a process module that spins a wafer | Jacob L. Hiester, Richard M. Blank, Peter Thaulad | 2020-05-12 |
| 10622243 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Adrien LaVoie, Chloe Baldasseroni +7 more | 2020-04-14 |
| 10570515 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Karl Leeser, Easwar Srinivasan | 2020-02-25 |
| 10573549 | Pad raising mechanism in wafer positioning pedestal for semiconductor processing | Karl Leeser, Easwar Srinivasan | 2020-02-25 |