Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796940 | Enhanced automatic wafer centering system and techniques for same | Peter Thaulad, Brett M. Herzig, Benjamin W. Mooring | 2020-10-06 |
| 10651065 | Auto-calibration to a station of a process module that spins a wafer | Jacob L. Hiester, Peter Thaulad, Paul Konkola | 2020-05-12 |