Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847352 | Compensating chamber and process effects to improve critical dimension variation for trim process | Pulkit Agarwal, Adrien LaVoie, Purushottam Kumar | 2020-11-24 |
| 10727143 | Method for controlling core critical dimension variation using flash trim sequence | Pulkit Agarwal, Adrien LaVoie, Purushottam Kumar | 2020-07-28 |